A new algorithm for layout of dark field alternating phase shifting masks - researchr publication authors

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Qinglang Luo, Xianlong Hong, Qiang Zhou, Yici Cai. A new algorithm for layout of dark field alternating phase shifting masks. In John Lach, Gang Qu, Yehea I. Ismail, editors, Proceedings of the 15th ACM Great Lakes Symposium on VLSI 2005, Chicago, Illinois, USA, April 17-19, 2005. pages 221-224, ACM, 2005. [doi]

This author has not been identified. Look up 'Qinglang Luo' in GoogleThis author has not been identified. Look up 'Xianlong Hong' in GoogleThis author has not been identified. Look up 'Qiang Zhou' in GoogleThis author has not been identified. Look up 'Yici Cai' in Google

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