Qinglang Luo, Xianlong Hong, Qiang Zhou, Yici Cai. A new algorithm for layout of dark field alternating phase shifting masks. In John Lach, Gang Qu, Yehea I. Ismail, editors, Proceedings of the 15th ACM Great Lakes Symposium on VLSI 2005, Chicago, Illinois, USA, April 17-19, 2005. pages 221-224, ACM, 2005. [doi]
Abstract is missing.