A comprehensive study of device variability of sub-5 nm nanosheet transistors and interplay with quantum confinement variation

Haowen Luo, Ruihan Li, Xiangshui Miao, Xingsheng Wang. A comprehensive study of device variability of sub-5 nm nanosheet transistors and interplay with quantum confinement variation. Science in China Series F: Information Sciences, 66(2), February 2023. [doi]

Authors

Haowen Luo

This author has not been identified. Look up 'Haowen Luo' in Google

Ruihan Li

This author has not been identified. Look up 'Ruihan Li' in Google

Xiangshui Miao

This author has not been identified. Look up 'Xiangshui Miao' in Google

Xingsheng Wang

This author has not been identified. Look up 'Xingsheng Wang' in Google