A comprehensive study of device variability of sub-5 nm nanosheet transistors and interplay with quantum confinement variation

Haowen Luo, Ruihan Li, Xiangshui Miao, Xingsheng Wang. A comprehensive study of device variability of sub-5 nm nanosheet transistors and interplay with quantum confinement variation. Science in China Series F: Information Sciences, 66(2), February 2023. [doi]

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