Haowen Luo, Ruihan Li, Xiangshui Miao, Xingsheng Wang. A comprehensive study of device variability of sub-5 nm nanosheet transistors and interplay with quantum confinement variation. Science in China Series F: Information Sciences, 66(2), February 2023. [doi]
@article{LuoLMW23,
title = {A comprehensive study of device variability of sub-5 nm nanosheet transistors and interplay with quantum confinement variation},
author = {Haowen Luo and Ruihan Li and Xiangshui Miao and Xingsheng Wang},
year = {2023},
month = {February},
doi = {10.1007/s11432-021-3399-3},
url = {https://doi.org/10.1007/s11432-021-3399-3},
researchr = {https://researchr.org/publication/LuoLMW23},
cites = {0},
citedby = {0},
journal = {Science in China Series F: Information Sciences},
volume = {66},
number = {2},
}