A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries

Ming Luo, Heng-Chao Yan, Bin Hu, Junhong Zhou, Chee Khiang Pang. A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries. Computers & Industrial Engineering, 85:414-422, 2015. [doi]

Authors

Ming Luo

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Heng-Chao Yan

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Bin Hu

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Junhong Zhou

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Chee Khiang Pang

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