Ming Luo, Heng-Chao Yan, Bin Hu, Junhong Zhou, Chee Khiang Pang. A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries. Computers & Industrial Engineering, 85:414-422, 2015. [doi]
@article{LuoYHZP15,
title = {A data-driven two-stage maintenance framework for degradation prediction in semiconductor manufacturing industries},
author = {Ming Luo and Heng-Chao Yan and Bin Hu and Junhong Zhou and Chee Khiang Pang},
year = {2015},
doi = {10.1016/j.cie.2015.04.008},
url = {http://dx.doi.org/10.1016/j.cie.2015.04.008},
researchr = {https://researchr.org/publication/LuoYHZP15},
cites = {0},
citedby = {0},
journal = {Computers & Industrial Engineering},
volume = {85},
pages = {414-422},
}