Logic Test Vehicles for High Resolution Diagnosis of Systematic FEOL/MEOL Yield Detractors

Yinxuan Lyu, Liangliang Yu, Pengju Li, Junlin Huang. Logic Test Vehicles for High Resolution Diagnosis of Systematic FEOL/MEOL Yield Detractors. In IEEE International Test Conference, ITC 2023, Anaheim, CA, USA, October 7-15, 2023. pages 117-121, IEEE, 2023. [doi]

Abstract

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