James D. Ma, Claire Fang Fang, Rob A. Rutenbar, Xiaolin Xie, Duane S. Boning. Interval-valued statistical modeling of oxide chemical-mechanical polishing. In 2005 International Conference on Computer-Aided Design (ICCAD 05), November 6-10, 2005, San Jose, CA, USA. pages 141-148, IEEE Computer Society, 2005.
@inproceedings{MaFRXB05,
title = {Interval-valued statistical modeling of oxide chemical-mechanical polishing},
author = {James D. Ma and Claire Fang Fang and Rob A. Rutenbar and Xiaolin Xie and Duane S. Boning},
year = {2005},
tags = {modeling},
researchr = {https://researchr.org/publication/MaFRXB05},
cites = {0},
citedby = {0},
pages = {141-148},
booktitle = {2005 International Conference on Computer-Aided Design (ICCAD 05), November 6-10, 2005, San Jose, CA, USA},
publisher = {IEEE Computer Society},
isbn = {0-7803-9254-X},
}