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Interval-valued statistical modeling of oxide chemical-mechanical polishing

James D. Ma, Claire Fang Fang, Rob A. Rutenbar, Xiaolin Xie, Duane S. Boning. Interval-valued statistical modeling of oxide chemical-mechanical polishing. In 2005 International Conference on Computer-Aided Design (ICCAD 05), November 6-10, 2005, San Jose, CA, USA. pages 141-148, IEEE Computer Society, 2005.

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