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Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures

Cheng-Wen Ma, Fu-Wei Lee, Hsin-Hung Liao, Wen-Cheng Kuo, Yao-Joe Yang. Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures. Sensors, 15(9):21567-21580, 2015. [doi]

Authors

Cheng-Wen Ma

This author has not been identified. Look up 'Cheng-Wen Ma' in Google

Fu-Wei Lee

This author has not been identified. Look up 'Fu-Wei Lee' in Google

Hsin-Hung Liao

This author has not been identified. Look up 'Hsin-Hung Liao' in Google

Wen-Cheng Kuo

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Yao-Joe Yang

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