Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures

Cheng-Wen Ma, Fu-Wei Lee, Hsin-Hung Liao, Wen-Cheng Kuo, Yao-Joe Yang. Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures. Sensors, 15(9):21567-21580, 2015. [doi]

Abstract

Abstract is missing.