Cheng-Wen Ma, Fu-Wei Lee, Hsin-Hung Liao, Wen-Cheng Kuo, Yao-Joe Yang. Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures. Sensors, 15(9):21567-21580, 2015. [doi]
@article{MaLLKY15,
title = {Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures},
author = {Cheng-Wen Ma and Fu-Wei Lee and Hsin-Hung Liao and Wen-Cheng Kuo and Yao-Joe Yang},
year = {2015},
doi = {10.3390/s150921567},
url = {http://dx.doi.org/10.3390/s150921567},
researchr = {https://researchr.org/publication/MaLLKY15},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {15},
number = {9},
pages = {21567-21580},
}