Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy

Xinyang Ma, Rui Xiong, Wei Wang, Xiangchao Zhang. Flexible Measurement of High-Slope Micro-Nano Structures with Tilted Wave Digital Holographic Microscopy. Sensors, 23(23):9526, December 2023. [doi]

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