Yuzhe Ma, Wei Zhong, Shuxiang Hu, Jhih-Rong Gao, Jian Kuang 0001, Jin Miao, Bei Yu 0001. A Unified Framework for Simultaneous Layout Decomposition and Mask Optimization. IEEE Trans. on CAD of Integrated Circuits and Systems, 39(12):5069-5082, 2020. [doi]
Abstract is missing.