Yoshihiko Maeda, Kazuyuki Aihara, Hiroyuki Fujita. A Vacuum-compatible X-Y Microactuator using the Levitational Effect of a Superconductor. In Toshi Takamori, Kazuo Tsuchiya, editors, Robotics, Mechatronics and Manufacturing Systems. pages 509-514, Elsevier, 1993. [doi]
Abstract is missing.