Comparative Study of TDDB Models on BEOL Interconnects for Sub-20 nm Spacings

Niaz Mahmud, Nabihah Azhari, J. R. Lloyd. Comparative Study of TDDB Models on BEOL Interconnects for Sub-20 nm Spacings. In IEEE International Reliability Physics Symposium, IRPS 2019, Monterey, CA, USA, March 31 - April 4, 2019. pages 1-4, IEEE, 2019. [doi]

Abstract

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