Gaussian Time Error: A new index for fault detection in semiconductor processes

Julien Marino, Francesco Rossi, Mustapha Ouladsine, Jacques Pinaton. Gaussian Time Error: A new index for fault detection in semiconductor processes. In 2016 American Control Conference, ACC 2016, Boston, MA, USA, July 6-8, 2016. pages 3237-3242, IEEE, 2016. [doi]

Abstract

Abstract is missing.