A Closed-loop MEMS force sensor with adjustable stiffness

Mohammad Maroufi, Hamed Alemansour, S. O. Reza Moheimani. A Closed-loop MEMS force sensor with adjustable stiffness. In IEEE Conference on Control Technology and Applications, CCTA 2017, Mauna Lani Resort, HI, USA, August 27-30, 2017. pages 438-443, IEEE, 2017. [doi]

@inproceedings{MaroufiAM17,
  title = {A Closed-loop MEMS force sensor with adjustable stiffness},
  author = {Mohammad Maroufi and Hamed Alemansour and S. O. Reza Moheimani},
  year = {2017},
  doi = {10.1109/CCTA.2017.8062501},
  url = {https://doi.org/10.1109/CCTA.2017.8062501},
  researchr = {https://researchr.org/publication/MaroufiAM17},
  cites = {0},
  citedby = {0},
  pages = {438-443},
  booktitle = {IEEE Conference on Control Technology and Applications, CCTA 2017, Mauna Lani Resort, HI, USA, August 27-30, 2017},
  publisher = {IEEE},
  isbn = {978-1-5090-2182-6},
}