A Closed-loop MEMS force sensor with adjustable stiffness

Mohammad Maroufi, Hamed Alemansour, S. O. Reza Moheimani. A Closed-loop MEMS force sensor with adjustable stiffness. In IEEE Conference on Control Technology and Applications, CCTA 2017, Mauna Lani Resort, HI, USA, August 27-30, 2017. pages 438-443, IEEE, 2017. [doi]

Abstract

Abstract is missing.