Fast image drift compensation in scanning electron microscope using image registration

Naresh Marturi, Sounkalo Dembele, Nadine Piat. Fast image drift compensation in scanning electron microscope using image registration. In 2013 IEEE International Conference on Automation Science and Engineering, CASE 2013, Madison, WI, USA, August 17-20, 2013. pages 807-812, IEEE, 2013. [doi]

Abstract

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