Nino A. Masnari, John R. Hauser, Gerald Lucovsky, Dennis M. Maher, Robert J. Markunas, Mehmet C. Bztork, Jimmie J. Wortman. Cener for advanced electronic materials processing. Proceedings of the IEEE, 81(1):42-59, 1993. [doi]
@article{MasnariHLMMBW93,
title = {Cener for advanced electronic materials processing},
author = {Nino A. Masnari and John R. Hauser and Gerald Lucovsky and Dennis M. Maher and Robert J. Markunas and Mehmet C. Bztork and Jimmie J. Wortman},
year = {1993},
doi = {10.1109/jproc.1993.752025},
url = {https://doi.org/10.1109/jproc.1993.752025},
researchr = {https://researchr.org/publication/MasnariHLMMBW93},
cites = {0},
citedby = {0},
journal = {Proceedings of the IEEE},
volume = {81},
number = {1},
pages = {42-59},
}