Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes - researchr publication authors

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Kei Masunishi, Etsuji Ogawa, Daiki Ono, Fumito Miyazaki, Kengo Uchida, Jumpei Ogawa, Hideaki Murase, Fumitaka Ishibashi, Yasushi Tomizawa. Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

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