Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes

Kei Masunishi, Etsuji Ogawa, Daiki Ono, Fumito Miyazaki, Kengo Uchida, Jumpei Ogawa, Hideaki Murase, Fumitaka Ishibashi, Yasushi Tomizawa. Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

@inproceedings{MasunishiOOMUOMIT23,
  title = {Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes},
  author = {Kei Masunishi and Etsuji Ogawa and Daiki Ono and Fumito Miyazaki and Kengo Uchida and Jumpei Ogawa and Hideaki Murase and Fumitaka Ishibashi and Yasushi Tomizawa},
  year = {2023},
  doi = {10.1109/SENSORS56945.2023.10324992},
  url = {https://doi.org/10.1109/SENSORS56945.2023.10324992},
  researchr = {https://researchr.org/publication/MasunishiOOMUOMIT23},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023},
  publisher = {IEEE},
  isbn = {979-8-3503-0387-2},
}