Kei Masunishi, Etsuji Ogawa, Daiki Ono, Fumito Miyazaki, Kengo Uchida, Jumpei Ogawa, Hideaki Murase, Fumitaka Ishibashi, Yasushi Tomizawa. Wide Dynamic Range of a MEMS Differential Resonant Accelerometer with Asymmetric T-Shaped Electrodes. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]
Abstract is missing.