Capacitive RF MEMS analytical predictive reliability and lifetime characterization

Mohamed Matmat, Fabio Coccetti, Antoine Marty, Robert Plana, Christophe Escriba, Jean-Yves Fourniols, Daniel Estève. Capacitive RF MEMS analytical predictive reliability and lifetime characterization. Microelectronics Reliability, 49(9-11):1304-1308, 2009. [doi]

@article{MatmatCMPEFE09,
  title = {Capacitive RF MEMS analytical predictive reliability and lifetime characterization},
  author = {Mohamed Matmat and Fabio Coccetti and Antoine Marty and Robert Plana and Christophe Escriba and Jean-Yves Fourniols and Daniel Estève},
  year = {2009},
  doi = {10.1016/j.microrel.2009.06.049},
  url = {http://dx.doi.org/10.1016/j.microrel.2009.06.049},
  tags = {reliability},
  researchr = {https://researchr.org/publication/MatmatCMPEFE09},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {49},
  number = {9-11},
  pages = {1304-1308},
}