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Capacitive RF MEMS analytical predictive reliability and lifetime characterization

Mohamed Matmat, Fabio Coccetti, Antoine Marty, Robert Plana, Christophe Escriba, Jean-Yves Fourniols, Daniel Estève. Capacitive RF MEMS analytical predictive reliability and lifetime characterization. Microelectronics Reliability, 49(9-11):1304-1308, 2009. [doi]

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