Mitsuo Matsumoto, Masayuki Kawabata, Yukio Kawanabe. High-speed measurement of Piezoelectric MEMS equivalent circuit parameters by Swept-sine and PRBS signals. In IEEE International Test Conference in Asia, ITC-Asia 2021, Shanghai, China, August 18-20, 2021. pages 1-6, IEEE, 2021. [doi]
Abstract is missing.