Yukio Matsuyama, Hisafumi Iwata, Hitoshi Kubota, Yasuo Nakagawa. Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation Pattern Matching Algorithm. Systems and Computers in Japan, 21(9):99-112, 1990. [doi]
@article{MatsuyamaIKN90,
title = {Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation Pattern Matching Algorithm},
author = {Yukio Matsuyama and Hisafumi Iwata and Hitoshi Kubota and Yasuo Nakagawa},
year = {1990},
doi = {10.1002/scj.4690210910},
url = {http://dx.doi.org/10.1002/scj.4690210910},
researchr = {https://researchr.org/publication/MatsuyamaIKN90},
cites = {0},
citedby = {0},
journal = {Systems and Computers in Japan},
volume = {21},
number = {9},
pages = {99-112},
}