Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation Pattern Matching Algorithm

Yukio Matsuyama, Hisafumi Iwata, Hitoshi Kubota, Yasuo Nakagawa. Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation Pattern Matching Algorithm. Systems and Computers in Japan, 21(9):99-112, 1990. [doi]

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