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Yukio Matsuyama, Hisafumi Iwata, Hitoshi Kubota, Yasuo Nakagawa. Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation Pattern Matching Algorithm. Systems and Computers in Japan, 21(9):99-112, 1990. [doi]
Possibly Related PublicationsThe following publications are possibly variants of this publication: Precise visual inspection for LSI wafer patterns using subpixel image alignmentTakashi Hiroi, Shunji Maeda, Hitoshi Kubota, Kenji Watanabe, Yasuo Nakagawa. wacv 1994: 26-34 [doi] Precise Visual Inspection Algorithm for LSI Wafer Patterns Using Grayscale Image ComparisonYukio Matsuyama, Hisafumi Iwata, Hitoshi Kubota, Yasuo Nakagawa. mva 1988: 401-404 [doi]
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