Carlos Mazure, Andre-Jacques Auberton-Herve. Engineering wafers for the nanotechnology era. In Laurent Fesquet, Andreas Kaiser, Sorin Cristoloveanu, Michel Brillouët, editors, Proceedings of the 31st European Solid-State Circuits Conference, ESSCIRC 2005, Grenoble, France, 12-16 September 2005. pages 29-38, IEEE, 2005. [doi]
Abstract is missing.