A. Mehdaoui, J. Pagazani, G. Schropfer, G. Lissorgues. SiP design flow and 3D DRC for MEMS. In 17th International Symposium on Design and Diagnostics of Electronic Circuits & Systems, DDECS 2014, Warsaw, Poland, 23-25 April, 2014. pages 12-13, IEEE, 2014. [doi]
Abstract is missing.