Processing of 3D multilevel SU-8 fluidic network assisted by PerMX dry-photoresist lamination

R. Ch. Meier, V. Badilita, U. Wallrabe, J. G. Korvink. Processing of 3D multilevel SU-8 fluidic network assisted by PerMX dry-photoresist lamination. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 308-311, IEEE, 2012. [doi]

Abstract

Abstract is missing.