Impact of Process Variation on MIM Capacitor Lifetime

Joost Melai, V. Subramanian, I. Pouwel. Impact of Process Variation on MIM Capacitor Lifetime. In IEEE International Reliability Physics Symposium, IRPS 2023, Monterey, CA, USA, March 26-30, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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