Mariam Melhem, Bouchra Ananou, Mustapha Ouladsine, Michel Combal, Jacques Pinaton. Analysis of similarities between alarm events in the semiconductor manufacturing process. In 25th Mediterranean Conference on Control and Automation, MED 2017, Valletta, Malta, July 3-6, 2017. pages 888-894, IEEE, 2017. [doi]
Abstract is missing.