Product quality prediction using alarm data : Application to the semiconductor manufacturing process

Mariam Melhem, Bouchra Ananou, Mustapha Ouladsine, Michel Combal, Jacques Pinaton. Product quality prediction using alarm data : Application to the semiconductor manufacturing process. In 25th Mediterranean Conference on Control and Automation, MED 2017, Valletta, Malta, July 3-6, 2017. pages 1332-1338, IEEE, 2017. [doi]

@inproceedings{MelhemAOCP17a,
  title = {Product quality prediction using alarm data : Application to the semiconductor manufacturing process},
  author = {Mariam Melhem and Bouchra Ananou and Mustapha Ouladsine and Michel Combal and Jacques Pinaton},
  year = {2017},
  doi = {10.1109/MED.2017.7984303},
  url = {https://doi.org/10.1109/MED.2017.7984303},
  researchr = {https://researchr.org/publication/MelhemAOCP17a},
  cites = {0},
  citedby = {0},
  pages = {1332-1338},
  booktitle = {25th Mediterranean Conference on Control and Automation, MED 2017, Valletta, Malta, July 3-6, 2017},
  publisher = {IEEE},
  isbn = {978-1-5090-4533-4},
}