Product quality prediction using alarm data : Application to the semiconductor manufacturing process

Mariam Melhem, Bouchra Ananou, Mustapha Ouladsine, Michel Combal, Jacques Pinaton. Product quality prediction using alarm data : Application to the semiconductor manufacturing process. In 25th Mediterranean Conference on Control and Automation, MED 2017, Valletta, Malta, July 3-6, 2017. pages 1332-1338, IEEE, 2017. [doi]

Abstract

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