Optimization of a BiCMOS integrated transducer for self-compensated capacitive pressure sensor

Philippe Ménini, Gabriel Blasquez, Patrick Pons, C. Douziech, P. Favaro, Philippe Dondon. Optimization of a BiCMOS integrated transducer for self-compensated capacitive pressure sensor. In 6th IEEE International Conference on Electronics, Circuits and Systems, ICECS 1999, Pafos, Cyprus, September 5-8, 1999. pages 1059-1063, IEEE, 1999. [doi]

Abstract

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