A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process - researchr publication authors

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Adel Merdassi, Peng Yang, Vamsy P. Chodavarapu. A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process. Sensors, 15(4):7349-7359, 2015. [doi]

This author has not been identified. Look up 'Adel Merdassi' in GoogleThis author has not been identified. Look up 'Peng Yang' in GoogleThis author has not been identified. Look up 'Vamsy P. Chodavarapu' in Google

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