A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

Adel Merdassi, Peng Yang, Vamsy P. Chodavarapu. A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process. Sensors, 15(4):7349-7359, 2015. [doi]

Abstract

Abstract is missing.