Adel Merdassi, Peng Yang, Vamsy P. Chodavarapu. A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process. Sensors, 15(4):7349-7359, 2015. [doi]
@article{MerdassiYC15,
title = {A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process},
author = {Adel Merdassi and Peng Yang and Vamsy P. Chodavarapu},
year = {2015},
doi = {10.3390/s150407349},
url = {http://dx.doi.org/10.3390/s150407349},
researchr = {https://researchr.org/publication/MerdassiYC15},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {15},
number = {4},
pages = {7349-7359},
}