Directional Repetitive Control of a Metrological AFM

Roel J. E. Merry, Michael J. C. Ronde, René van de Molengraft, Richard K. Koops, Maarten Steinbuch. Directional Repetitive Control of a Metrological AFM. IEEE Trans. Contr. Sys. Techn., 19(6):1622-1629, 2011. [doi]

Abstract

Abstract is missing.