Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage - researchr publication authors

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Roel J. E. Merry, Mustafa Uyanik, Richard K. Koops, René van de Molengraft, Marijn van Veghel, Maarten Steinbuch. Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage. In American Control Conference, ACC 2008, Seattle, WA, USA, 11-13 June 2008. pages 2716-2721, IEEE, 2008. [doi]

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