B. Mezghani, F. Tounsi, S. Smaoui, M. B. Jallouli, M. Masmoudi. Mechanical-thermal noise in CMOS micromachined inductive microphone. In 12th IEEE International Conference on Electronics, Circuits, and Systems, ICECS 2005, Gammarth, Tunisia, December 11-14, 2005. pages 1-4, IEEE, 2005. [doi]
Abstract is missing.