Conductive behavior modeling of dual-axis CMOS MEMS convective accelerometers using 3D FEM and spherical model

B. Mezghani, F. Tounsi, H. Yaich, M. Masmoudi. Conductive behavior modeling of dual-axis CMOS MEMS convective accelerometers using 3D FEM and spherical model. In 10th International Multi-Conferences on Systems, Signals & Devices, SSD 2013, Hammamet, Tunisia, March 18-21, 2013. pages 1-6, IEEE, 2013. [doi]

Abstract

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