Precise EOT regrowth extraction enabling performance analysis of low temperature extension first devices

Jessy Micout, Quentin Rafhay, X. Garros, Mikaël Casse, Jean Coignus, L. Pasini, Cao-Minh Vincent Lu, Nils Rambal, Claire Fenouillet-Béranger, Laurent Brunet, G. Romano, R. Gassilloud, Perrine Batude, Maud Vinet, Gérard Ghibaudo. Precise EOT regrowth extraction enabling performance analysis of low temperature extension first devices. In 47th European Solid-State Device Research Conference, ESSDERC 2017, Leuven, Belgium, September 11-14, 2017. pages 144-147, IEEE, 2017. [doi]

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