Wafer-scale fabrication of biologically sensitive Si nanowire FET: from pH sensing to electrical detection of DNA hybridization

R. Midahuen, Bernard Previtali, C. Fontelaye, G. Nonglaton, Sylvain Barraud, V. Stambouli. Wafer-scale fabrication of biologically sensitive Si nanowire FET: from pH sensing to electrical detection of DNA hybridization. In 47th ESSCIRC 2021 - European Solid State Circuits Conference, ESSCIR 2021, Grenoble, France, September 13-22, 2021. pages 175-178, IEEE, 2021. [doi]

Abstract

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