Nicki Mika, Thomas Melde, Stefan Dünkel, Michael Otto, Francois Weisbuch, Peter Krottenthaler, Thomas Mikolajick. Experimental fabrication of an ESF3 floating gate flash cell in an FD-SOI process. In 52nd IEEE European Solid-State Device Research Conference, ESSDERC 2022, Milan, Italy, September 19-22, 2022. pages 356-359, IEEE, 2022. [doi]
Abstract is missing.