Litho-Friendly Decomposition Method for Self-Aligned Double Patterning

Minoo Mirsaeedi, Andres J. Torres, Mohab H. Anis. Litho-Friendly Decomposition Method for Self-Aligned Double Patterning. IEEE Trans. VLSI Syst., 21(8):1469-1480, 2013. [doi]

Abstract

Abstract is missing.