Empowering CMOS-VLSI by MEMS Technology - An Example of High-Voltage Photovoltaic Chiplet Integration for Autonomous Micro Robotic Systems

Yoshio Mita. Empowering CMOS-VLSI by MEMS Technology - An Example of High-Voltage Photovoltaic Chiplet Integration for Autonomous Micro Robotic Systems. In International Conference on IC Design and Technology, ICICDT 2023, Tokyo, Japan, September 25-28, 2023. IEEE, 2023. [doi]

Abstract

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